LASER PROCESSING IN SILICON MICROELECTRONICS TECHNOLOGY.

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作者：
Leamy, H.J.
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IEEE transactions on components, hybrids, and manufacturing technology | 1981年 / CHMT-5卷 / 01期
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摘要：
Laser irradiation may effect either thermal or chemical changes in target materials. A brief review of the mechanisms involved and a summary assessment of their potential for application in silicon microelectronics technology is presented.
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页码：112 / 117
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