Fracture mechanics tests for measuring the adhesion of magnetron-sputtered TiN coatings

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[1] Mueller, D.
[2] Cho, Y.R.
[3] Berg, S.
[4] Fromm, E.
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Mueller, D. | 1600年 / Publ by VSP Int Sci Publ, Zeist, Netherlands卷 / 07期
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