共 50 条
- [32] Surface Activated Room-temperature Bonding in Ar Gas Ambience for MEMS Encapsulation 2017 5TH INTERNATIONAL WORKSHOP ON LOW TEMPERATURE BONDING FOR 3D INTEGRATION (LTB-3D), 2017, : 46 - 46
- [33] Structural analysis of diamond/silicon heterointerfaces fabricated by surface activated bonding at room temperature 2021 7TH INTERNATIONAL WORKSHOP ON LOW TEMPERATURE BONDING FOR 3D INTEGRATION (LTB-3D), 2021, : 12 - 12
- [36] Cu/SiO2 hybrid bonding obtained by surface-activated bonding method at room temperature using Si ultrathin films MICRO AND NANO ENGINEERING, 2019, 2 : 1 - 6
- [37] Cu-Cu Direct Bonding Achieved by Surface Method at Room Temperature IRAGO CONFERENCE 2013, 2014, 1585 : 102 - 107
- [38] Effect of the surface roughness on room temperature bonding Yosetsu Gakkai Shi/Journal of the Japan Welding Society, 2000, 69 (02): : 54 - 57