Structural properties of amorphous carbon nitride films prepared by reactive RF-magnetron sputtering

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[1] Nakayama, Noriaki
[2] Tsuchiya, Yasuaki
[3] Tamada, Satoru
[4] Kosuge, Kouji
[5] Nagata, Shinji
[6] Takahiro, Katsumi
[7] Yamaguchi, Sadae
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Nakayama, Noriaki | 1600年 / 32期
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Amorphous films;
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