X-ray residual stress measurement of aluminum thin films with [111] fiber texture

被引:0
|
作者
Nagoya Univ, Nagoya, Japan [1 ]
机构
来源
Zairyo | / 10卷 / 1138-1144期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
14
引用
收藏
相关论文
共 50 条
  • [31] X-RAY DETERMINATION OF THE RESIDUAL-STRESSES IN THIN ALUMINUM FILMS DEPOSITED ON SILICON SUBSTRATES
    KORHONEN, MA
    PASZKIET, CA
    SCRIPTA METALLURGICA, 1989, 23 (08): : 1449 - 1453
  • [32] Accuracy and reproducibility of X-ray texture measurements on thin films
    Vaudin, MD
    Fox, GR
    Kowach, GR
    MAGNETIC AND ELECTRONIC FILMS-MICROSTRUCTURE, TEXTURE AND APPLICATION TO DATA STORAGE, 2002, 721 : 17 - 22
  • [33] X-ray texture analysis of oriented PZT thin films
    Peterson, CR
    Medendorp, NW
    Slamovich, EB
    Bowman, KJ
    FERROELECTRIC THIN FILMS V, 1996, 433 : 297 - 302
  • [34] Early yielding and stress recovery in (111) and (100) texture components in Cu thin films determined using synchrotron x-ray diffraction
    Nowak, DE
    Baker, SP
    THIN FILMS-STRESSES AND MECHANICAL PROPERTIES X, 2004, 795 : 449 - 454
  • [35] Study of residual stress measurement of rolling aluminum alloy using x-Ray diffraction method
    Sun, Jiantong
    Li, Xiaoyan
    Zhang, Liang
    Yao, Wentao
    Li, Qingqing
    Hanjie Xuebao/Transactions of the China Welding Institution, 2017, 38 (01): : 61 - 64
  • [36] X-ray stress measurement of TiN thin film with <110> fiber texture under external loading
    Tanaka, K
    Ito, T
    Akiniwa, Y
    Kimachi, H
    Miki, Y
    MATERIALS SCIENCE RESEARCH INTERNATIONAL, 2000, 6 (04): : 231 - 236
  • [37] Texture evolution and stress in silver thin films on different substrates using x-ray diffraction
    Zoo, Yeongseok
    Alford, Terry L.
    MATERIALS, PROCESSES, INTEGRATION AND RELIABILITY IN ADVANCED INTERCONNECTS FOR MICRO- AND NANOELECTRONICS, 2007, 990 : 147 - 152
  • [39] X-ray stress measurements of TiCN thin films
    Gotoh, M
    Murotani, T
    Sasaki, T
    Hirose, Y
    ECRS 6: PROCEEDINGS OF THE 6TH EUROPEAN CONFERENCE ON RESIDUAL STRESSES, 2002, 404-7 : 677 - 682
  • [40] Evaluation of residual stress in thin ferroelectric films using grazing incident X-ray diffraction
    Petrov, PK
    Sarma, K
    Alford, NM
    INTEGRATED FERROELECTRICS, 2004, 63 : 183 - 189