X-ray residual stress measurement of aluminum thin films with [111] fiber texture

被引：0
|
作者：
Nagoya Univ, Nagoya, Japan [1 ]
机构：
来源：
Zairyo | / 10卷 / 1138-1144期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
14
引用
收藏
相关论文
共 50 条
  • [1] X-ray measurements of residual stress distribution in TiN thin films with fiber texture
    Tanaka, K
    Akiniwa, Y
    Kawai, M
    Ito, T
    RESIDUAL STRESSES VII, PROCEEDINGS, 2005, 490-491 : 678 - 683
  • [2] Elastic constants and X-ray stress measurement of cubic thin films with fiber texture
    Tanaka, Keisuke
    Akiniwa, Yoshiaki
    Ito, Toshimasa
    Inoue, Kaoru
    JSME International Journal, Series A: Mechanics and Material Engineering, 1999, 42 (02): : 224 - 234
  • [3] Elastic constants and X-ray stress measurement of cubic thin films with fiber texture
    Tanaka, K
    Akiniwa, Y
    Ito, T
    Inoue, K
    JSME INTERNATIONAL JOURNAL SERIES A-SOLID MECHANICS AND MATERIAL ENGINEERING, 1999, 42 (02): : 224 - 234
  • [4] X-ray measurement of residual stress in patterned aluminum thin films sputtered on silicon wafers
    Tanaka, K
    Akiniwa, Y
    Inoue, K
    Ohta, H
    JSME INTERNATIONAL JOURNAL SERIES A-SOLID MECHANICS AND MATERIAL ENGINEERING, 1998, 41 (02): : 290 - 296
  • [5] X-ray residual stress measurement in films with crystallographic texture and grain shape
    Yu, LG
    Hendrix, BC
    Xu, KW
    He, JW
    Gu, HC
    POLYCRYSTALLINE THIN FILMS: STRUCTURE, TEXTURE, PROPERTIES, AND APPLICATIONS II, 1996, 403 : 177 - 182
  • [6] X-ray residual stress measurement in titanium nitride thin films
    Dopita, M
    Rafaja, D
    ZEITSCHRIFT FUR KRISTALLOGRAPHIE, 2006, : 67 - 72
  • [7] Residual stress of aluminum thin films measured by X-ray and curvature methods
    Tanaka, K
    Ishihara, K
    Akiniwa, Y
    Ohta, H
    MATERIALS SCIENCE RESEARCH INTERNATIONAL, 1996, 2 (03): : 153 - 159
  • [8] X-Ray Measurement of Residual Stress Distribution in Sputtered Cu Thin Films
    Akiniwa, Yoshiaki
    Sakaue, Taku
    THERMEC 2011, PTS 1-4, 2012, 706-709 : 1649 - +
  • [9] Texture, residual stress and structural analysis of thin films using a combined X-ray analysis
    Lutterotti, L
    Chateigner, D
    Ferrari, S
    Ricote, J
    THIN SOLID FILMS, 2004, 450 (01) : 34 - 41
  • [10] Measurement of residual stress distribution in sputtered cu thin films by X-ray method
    Dept. of Mech. Sci. and Eng., Nagoya Univ., Chikusa-ku, Nagoya, 464-8603, Japan
    Zairyo, 2009, 7 (575-580):
12345