GONIOMETRIC STUDIES OF THE MACHINING OF SURFACES OF VARIOUS MATERIALS IN A FLUORINE-CONTAINING PLASMA.

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作者：
Maksimov, A.I.
Serova, N.Yu.
Titov, V.A.
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Soviet Surface Engineering and Applied Electrochemistry (English translation of Elektronnaya Obrab | 1985年 / 03期
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页码：47 / 50
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