Focused high energy proton beam micromachining: A perspective view

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作者：
Watt, Frank [1 ]
机构：
[1] Research Centre for Nuclear Microscopy, Department of Physics, National University of Singapore, 119260 Singapore, Singapore
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1999年 / 158卷 / 01期
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页码：165 / 172
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