Scratch test of DLC and fluorinated DLC deposited by unbalanced magnetron sputtering method and the influence of fluorine on the properties of DLC

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作者：
Zhao, Jiansheng
Xu, Daqing
Choy, Kwang-Leong
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Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering | 1999年 / 35卷 / 05期
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页码：80 / 84
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