Electric properties of zinc oxide epitaxial films grown by ion-beam sputtering with oxygen-radical irradiation

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作者：
Tsurumi, Takaaki [1 ]
Nishizawa, Shuichi [1 ]
Ohashi, Naoki [1 ]
Ohgaki, Takeshi [1 ]
机构：
[1] Department of Inorganic Materials, Tokyo Institute of Technology, Ookayama, Meguro-ku, Tokyo 152-8552, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 6 A期
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页码：3682 / 3688
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