Modification of porous silica antireflective coatings with fluorine-containing organosilicon

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Chengdu Fine Optical Engineering Research Centre, Chengdu, Sichuan 610041, China [1 ]
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Guangxue Xuebao | 2009年 / 6卷 / 1719-1723期
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10.3788/AOS20092906.1719
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