Effects of thermal deformation of multi-wire saw's wire guides and ingot on slicing accuracy

被引：0
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作者：
Abe, Yoshinori [1 ]
Ishikawa, Ken-Ichi [2 ]
Suwabe, Hitoshi [2 ]
机构：
[1] Toyo Advanced Technologies Co., Ltd., 5-5-38 Ujina-higashi, Minami-ku, Hiroshima 734-8501, Japan
[2] Kanazawa Institute of Technology, 7-1 Ohgigaoka, Nonoichi, Ishikawa 921-8501, Japan
来源：
Key Engineering Materials | 2009年 / 389-390卷
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页码：442 / 447
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