Design and analysis of a novel xy micro-positioning stage used corrugated flexure beams

被引：7
|
作者：
机构：
[1] Wang, Nianfeng
[2] Liang, Xiaohe
[3] Zhang, Xianmin
来源：
| 1600年 / Springer Verlag卷 / 8918期
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D O I：
10.1007/978-3-319-13963-0_59
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