Sliding mode control with frequency shaped hyperplane for ball screw driving stage

被引：0
|
作者：
Hakoda, Fumihiko [1 ]
Sone, Yasuhiro [1 ]
Yamauchi, Atsushi [1 ]
Nonami, Kenzo [1 ]
机构：
[1] Nikon Corporation, 1-6-3 Nishi-Ohi, Shinagawa-ku, Tokyo, 140-8601, Japan
来源：
Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C | 2007年 / 73卷 / 04期
关键词：
D O I：
10.1299/kikaic.73.1119
中图分类号：
学科分类号：
摘要：
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页码：1119 / 1126
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