Preparation and characterization of transparent conducting ZnO: Zr films deposited by reactive magnetron sputtering

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作者：
Zhang, Hua-Fu [1 ]
Niu, Rui-Hua [2 ]
机构：
[1] School of Science, Shandong University of Technology, Zibo 255049, China
[2] Southwest Institute of Technical Physics, Chengdu 610041, China
来源：
Guangdianzi Jiguang/Journal of Optoelectronics Laser | 2012年 / 23卷 / 07期
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页码：1333 / 1337
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