Design and implementation of surface shape control system for membrane mirror

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作者
Zhang, Geng-Sheng [1 ,2 ]
Tang, Min-Xue [1 ,2 ]
Shen, Wei-Min [1 ,3 ]
Yu, Jian-Jun [1 ,3 ]
机构
[1] Jiangsu Key Laboratory of Modern Optical Technology, Soochow University, Suzhou 215006, China
[2] Institute of Information Optics Engineering, Soochow University, Suzhou 215006, China
[3] Modern Optical Technology Institute, Soochow University, Suzhou 215006, China
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页码:1079 / 1084
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