Effect of annealing temperature on the structural and electrical properties of poly-Si films prepared by rapid thermal annealing

被引：0
|
作者：
Zhang, Lei [1 ]
Shen, Hong-Lie [1 ]
You, Jia-Yi [1 ]
机构：
[1] College of Materials Science and Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
来源：
Rengong Jingti Xuebao/Journal of Synthetic Crystals | 2012年 / 41卷 / 05期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1186 / 1189
相关论文
共 50 条
  • [41] Effect of rapid thermal annealing on the structural and electrical properties of solid ZnO/NiO heterojunctions prepared by a chemical solution process
    Lee, Yi-Mu
    Yang, Hsi-Wen
    Huang, Chao-Ming
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2012, 45 (22)
  • [42] Effects of rapid thermal annealing on the structural and electrical properties of Na-doped ZnMgO films
    Xue, Ya
    He, Haiping
    Jin, Yizheng
    Ye, Zhizhen
    APPLIED SURFACE SCIENCE, 2011, 257 (14) : 5927 - 5930
  • [43] Fabrication of a high-performance poly-Si thin-film transistor using a poly-Si film prepared by silicide-enhanced rapid thermal annealing process
    Yong Ho Yang
    Kyung Min Ahn
    Seung Mo Kang
    Sun Hong Moon
    Byung Tae Ahn
    Electronic Materials Letters, 2014, 10 : 1081 - 1085
  • [44] Influence of the rapid thermal annealing on the properties of thin a-Si films
    Nedev, N
    Beshkov, G
    Fortunato, E
    Georgiev, SS
    Ivanov, T
    Raniero, L
    Zhang, SB
    Martins, R
    ADVANCED MATERIALS FORUM II, 2004, 455-456 : 108 - 111
  • [45] Fabrication of a High-Performance Poly-Si Thin-Film Transistor Using a Poly-Si Film Prepared by Silicide-Enhanced Rapid Thermal Annealing Process
    Yang, Yong Ho
    Ahn, Kyung Min
    Kang, Seung Mo
    Moon, Sun Hong
    Ahn, Byung Tae
    ELECTRONIC MATERIALS LETTERS, 2014, 10 (06) : 1081 - 1085
  • [46] Effects of rapid thermal annealing on the morphology and electrical properties of ZnO/In films
    Ma, TY
    Shim, DK
    THIN SOLID FILMS, 2002, 410 (1-2) : 8 - 13
  • [47] Effect of thermal annealing on structural and electrical properties of tio2 thin films
    Nagabharana, R. M.
    Kumaraswamy, G. N.
    Gundanna, Susheel Kumar
    Bhatta, Umananda M.
    THIN SOLID FILMS, 2020, 710
  • [48] Effect of rapid thermal annealing on the structural and magnetic properties of nanostructured FePt thin films
    Jalalizadeh, Younes
    Ghasemi, Ali
    Gordani, Gholamreza
    ULTRAFINE GRAINED AND NANO-STRUCTURED MATERIALS IV, 2014, 829 : 396 - 400
  • [49] Effect of annealing temperature on surface, structural and electrical properties of titanium dioxide thin films prepared by sol gel method
    Ahmad, M. K.
    Rasheid, N. A.
    Ahmed, A. Zain
    Abdullah, S.
    Rusop, M.
    JURNAL FIZIK MALAYSIA, 2008, 29 (3-4): : 71 - 74
  • [50] The effect of annealing temperature on the structural and electrical properties of ultrasonically sprayed cadmium oxide films
    Akyuz, I.
    Kose, S.
    Atay, F.
    Bilgin, V.
    JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2007, 9 (12): : 3812 - 3815
12345