Effect of annealing temperature on the structural and electrical properties of poly-Si films prepared by rapid thermal annealing

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作者：
Zhang, Lei [1 ]
Shen, Hong-Lie [1 ]
You, Jia-Yi [1 ]
机构：
[1] College of Materials Science and Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
来源：
Rengong Jingti Xuebao/Journal of Synthetic Crystals | 2012年 / 41卷 / 05期
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页码：1186 / 1189
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