共 50 条
- [42] MICROMECHANICAL RESONATORS WITH NEAR-LINEAR RESPONSE PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, VOL 13, PTS A AND B, 2009, : 357 - 363
- [44] Pyrolytic carbon resonators for micromechanical thermal analysis Microsystems & Nanoengineering, 5
- [47] Charge-biased vibrating micromechanical resonators 2005 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4, 2005, : 1596 - 1599
- [48] Fabrication of electroplated nickel micromechanical comb resonators ELECTROCHEMICAL TECHNOLOGY APPLICATIONS IN ELECTRONICS III, 2000, 99 (34): : 197 - 202
- [50] Investigation of energy loss mechanisms in micromechanical resonators BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2003, : 332 - 335