共 50 条
- [3] Energy Dissipation in Micromechanical Resonators MICRO- AND NANOTECHNOLOGY SENSORS, SYSTEMS, AND APPLICATIONS III, 2011, 8031
- [7] Process compensated micromechanical resonators PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 2007, : 1 - 4