Tribological properties of MoS2 films sputtered by argon and fluorocarbon mixture

被引：0
|
作者：
Sagara, Kazuhito [1 ]
Nishimura, Makoto [2 ]
机构：
[1] Graduate School, Hosei University, 7-2, Kajino-cho 3-chome, Koganei-shi, Tokyo 184-8584
[2] Department of Mechanical Engineering, Faculty of Engineering, Hosei University, 7-2, Kajino-cho 3-chome, Koganei-shi, Tokyo 184-8584
来源：
Toraibarojisuto/Journal of Japanese Society of Tribologists | 2007年 / 52卷 / 02期
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页码：148 / 155
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