Deposition and characterization of TiN coatings on 15-5PH stainless steel substrates

被引：0
|
作者：
Chen, Meiyan [1 ]
Shen, Liru [1 ]
Tong, Honghui [1 ]
Jin, Fanya [1 ]
Xu, Zejin [1 ]
机构：
[1] Southwest Institute of Physics, Chengdu 610041, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2013年 / 33卷 / 03期
关键词：
D O I：
10.3969/j.issn.1672-7126.2013.03.01
中图分类号：
学科分类号：
摘要：
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页码：197 / 202
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