Novel method for determining residual stresses of hard coatings

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作者：
Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China [1 ]
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来源：
Jinshu Xuebao | 2008年 / 1卷 / 125-128期
关键词：
Residual stresses;
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摘要：
A new method-stripping layer-substrate curvature was put forward to determine the residual stresses of hard coatings. A set of optical lever system was designed to measure accurately the curvature of the sample bended by the stresses of the films, and then the residual stresses can be calculated. Through detecting the error of the measuring equipment and testing the residual stresses in (Ti, Al)N films deposited using arc ion plating, the effectiveness of the method was proved.
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