Transmission electron microscopy study on FeSi2 nanoparticles synthesized by electron-beam evaporation

被引：0
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作者：
Won, Jong Han [1 ]
Sato, Kazuhisa [2 ]
Ishimaru, Manabu [2 ]
Hirotsu, Yoshihiko [2 ]
机构：
[1] Department of Materials Science and Engineering, Osaka University, Suita, Osaka 565-0871, Japan
[2] Institute of Scientific and Industrial Research, Osaka University, Ibaraki, Osaka 567-0047, Japan
来源：
Journal of Applied Physics | 2006年 / 100卷 / 01期
关键词：
We have synthesized epitaxially grown iron disilicide (FeSi2) nanoparticles using an electron-beam evaporation technique and characterized them by transmission electron microscopy (TEM). An Fe film was deposited on a Si(100) substrate; followed by thermal annealing at 1073 K for 2 h. It was found that epitaxially grown nanoparticles with an average size of ∼ 10 nm were formed just beneath the Si surface; suggesting that the deposited Fe atoms diffuse into the substrate. Every single phase of nanoparticles was examined in detail by TEM observation; nanobeam electron diffraction; and energy-dispersive x-ray spectroscopy. Plan-view and cross-sectional TEM observations revealed that these nanoparticles consist of α-; α-; and γ-FeSi 2. It was found that the morphology of nanoparticles is closely related to the phases. The α and β phases consist of angled hemisphere and asymmetric triangle-shaped nanoparticles; respectively; while the γ phase consists of hemispherical or columnar-shaped nanoparticles. These particle morphologies are discussed with respect to the lattice mismatches between the particles and the matrix. © 2006 American Institute of Physics;
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