White light interference-based grayscale height mapping for fast on-machine measurement

被引：0
|
作者：
Meng, DingKun [1 ]
Zhu, ZhiWei [1 ]
Huang, Peng [1 ]
机构：
[1] School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing,210094, China
来源：
Zhongguo Kexue Jishu Kexue/Scientia Sinica Technologica | 2024年 / 54卷 / 11期
关键词：
D O I：
10.1360/SST-2024-0082
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：2131 / 2142
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