High acceleration ultra-precision measurement model in laser heterodyne interferometry

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作者
Chen, Hong-Fang
Ding, Xue-Mei
Zhong, Zhi
Tan, Jiu-Bin
Wang, Wei-Ya
Xie, Zhan-Lei
Li, Hai-Ying
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[1] Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China
[2] Department of Communication Engineering, Harbin Institute of Technology, Harbin 150001, China
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页码:72 / 75
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