Design of electrostatic lenses in nanometer scale focusing ion beam system

被引：0
|
作者：
Li, Wen-Ping [1 ]
Gu, Wen-Qi [2 ]
机构：
[1] Beihang University, Beijing 100083, China
[2] Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100080, China
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2007年 / 15卷 / 06期
关键词：
10;
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页码：829 / 834
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