Design of randomly encoded hybrid grating for wavefront testing by quadriwave lateral shearing interferometry

被引:0
|
作者
Yue, Xiumei [1 ]
Yang, Yongying [1 ]
Ling, Tong [1 ]
Liu, Dong [1 ]
Luo, Yandong [1 ]
Bai, Jian [1 ]
Shen, Yibing [1 ]
机构
[1] State Key Laboratory of Modern Optical Instrumentation, Department of Optical Engineering, Zhejiang University, Hangzhou,Zhejiang,310027, China
来源
关键词
Diffraction fields - Diffraction orders - Far field diffractions - Far-field intensity distribution - Fraunhofer diffraction - Hybrid grating - Lateral shearing interferometry - Wavefront aberrations;
D O I
10.3788/CJL201542.1008006
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [31] Quadriwave lateral shearing interferometry for quantitative phase microscopy: coupling phase imaging and fluorescence imaging
    Bon, Pierre
    Savatier, Julien
    Wattellier, Benoit
    Marguet, Didier
    Monneret, Serge
    THREE-DIMENSIONAL AND MULTIDIMENSIONAL MICROSCOPY: IMAGE ACQUISITION AND PROCESSING XVIII, 2011, 7904
  • [32] Quadriwave lateral shearing interferometry for quantitative phase microscopy: applications to long-duration imaging
    Bon, Pierre
    Wattellier, Benoit
    Monneret, Serge
    Marguet, Didier
    THREE-DIMENSIONAL AND MULTIDIMENSIONAL MICROSCOPY: IMAGE ACQUISITION AND PROCESSING XVII, 2010, 7570
  • [33] Modal wavefront reconstruction based on Zernike polynomials for lateral shearing interferometry
    Dai, Fengzhao
    Zheng, Yazhong
    Bu, Yang
    Wang, Xiangzhao
    APPLIED OPTICS, 2017, 56 (01) : 61 - 68
  • [34] FFT wavefront reconstruction algorithm with periodical extension for lateral shearing interferometry
    Li, Peng
    Tang, Feng
    Wang, Xiangzhao
    OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS VII, 2020, 11552
  • [35] Wavefront reconstruction for lateral shearing interferometry based on difference polynomial fitting
    Li, Jie
    Tang, Feng
    Wang, Xiangzhao
    Dai, Fengzhao
    Feng, Peng
    Li, Sikun
    JOURNAL OF OPTICS, 2015, 17 (06)
  • [36] Lateral shearing interferometry applied for phase measurement in wavefront coherent synthesis
    Hu, Yao
    Wang, Wei
    6TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTICAL SYSTEM TECHNOLOGIES FOR MANUFACTURING AND TESTING, 2012, 8420
  • [37] A partial differential equation algorithm for wavefront reconstruction in lateral shearing interferometry
    Liu, Xiaojun
    Gao, Yongsheng
    Chang, Ming
    JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2009, 11 (04):
  • [38] Lateral shearing interferometry for high-NA EUV wavefront metrology
    Zhu, Wenhua
    Miyakawa, Ryan
    Chen, Lei
    Naulleau, Patrick
    INTERNATIONAL CONFERENCE ON EXTREME ULTRAVIOLET LITHOGRAPHY 2018, 2018, 10809
  • [39] Extended wavefront reconstruction for quadri-wave lateral shearing interferometry
    Song, In -Ung
    Choi, Jae-Hyuck
    Rhee, Hyug-Gyo
    Kihm, Hagyong
    Yang, Ho-Soon
    OPTICS AND LASERS IN ENGINEERING, 2024, 178
  • [40] Determination of the wavefront errors of an astronomical telescope using lateral shearing interferometry
    Humphries, CM
    Harris, JW
    Atad, E
    MONTHLY NOTICES OF THE ROYAL ASTRONOMICAL SOCIETY, 1997, 284 (03) : 655 - 668