Dislocation structure in AlN films induced by in situ transmission electron microscope nanoindentation

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[1] Tokumoto, Yuki
[2] 1,Kutsukake, Kentaro
[3] Ohno, Yutaka
[4] Yonenaga, Ichiro
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Tokumoto, Y. (y.tokumoto@imr.tohoku.ac.jp) | 1600年 / American Institute of Physics Inc.卷 / 112期
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