Device-level vacuum packaging of silicon microgyroscopes

被引：3
|
作者：
Shi, Qin [1 ]
Ding, Rongzheng [2 ]
Su, Yan [1 ]
Qiu, Anping [1 ]
机构：
[1] Ministerial Key Laboratory of ZNDY, Nanjing University of Science and Technology, Nanjing 210094, China
[2] Wuxi Zhongwei High Technology Electronics Co. Ltd., Wuxi 214035, China
来源：
Jixie Gongcheng Xuebao/Journal of Mechanical Engineering | 2009年 / 45卷 / 02期
关键词：
D O I：
10.3901/JME.2009.02.243
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：243 / 246
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