Chemical mechanical polishing research of CdZnTe functional crystalline with soft brittle nature

被引：4
|
作者：
Key Laboratory for Precision and Non-traditional Machining Technology, Dalian University of Technology, Dalian 116024, China [1 ]
机构：
来源：
Jixie Gongcheng Xuebao | 2008年 / 12卷 / 215-220+225期
关键词：
10;
D O I：
10.3901/JME.2008.12.215
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学科分类号：
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