共 50 条
- [21] Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2013, 31 (01):
- [23] Effect of Deposition Temperature on the Characteristics of Ga2O3 Films Grown on Flexible Mica and the Performance of Corresponding Photodetectors ACS APPLIED OPTICAL MATERIALS, 2025, 3 (02): : 272 - 283
- [27] Low temperature growth of single-phase and preferentially oriented ε-Ga2O3 films on sapphire substrates via atomic layer deposition JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2025, 43 (01):
- [28] Ga2O3 thin film growth on c-plane sapphire substrates by molecular beam epitaxy for deep-ultraviolet photodetectors JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (11): : 7217 - 7220