Sub-microsecond response time deep-ultraviolet photodetectors using α-Ga2O3 thin films grown via low-temperature atomic layer deposition

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Lee, Seung Hyun [1 ]
Lee, Kang Min [1 ]
Kim, Young-Bin [2 ]
Moon, Yoon-Jong [2 ]
Kim, Soo Bin [1 ]
Bae, Dukkyu [3 ]
Kim, Tae Jung [4 ]
Kim, Young Dong [4 ]
Kim, Sun-Kyung [2 ]
Lee, Sang Woon [1 ]
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[1] Department of Energy Systems Research and Department of Physics, Ajou University, Gyeonggi-do,16499, Korea, Republic of
[2] Department of Applied Physics, Kyung Hee University, Gyeonggi-do,17104, Korea, Republic of
[3] Hexa Solution Co., Ltd., Gyeonggi-do,16229, Korea, Republic of
[4] Department of Physics, Kyung Hee University, Seoul,02447, Korea, Republic of
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页码:400 / 407
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