Subnanometer surface roughness of dc magnetron sputtered Al films

被引：0
|
作者：
Rode, D.L. [1 ]
Gaddam, V.R. [1 ]
Yi, Ji Haeng [1 ]
机构：
[1] Department of Electrical and Systems Engineering, Washington University, St. Louis, MO 63130, United States
来源：
Journal of Applied Physics | 2007年 / 102卷 / 02期
关键词：
38;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
下载
收藏
相关论文
共 50 条
  • [41] Physical investigations of DC magnetron sputtered indium tin oxide films
    Uthanna, S
    Reddy, PS
    Naidu, BS
    Reddy, PJ
    VACUUM, 1996, 47 (01) : 91 - 93
  • [42] Mechanical and corrosion properties of dc magnetron sputtered Al/Cr multilayers
    Creus, J.
    Top, E. H.
    Savall, C.
    Refait, Ph.
    Ducros, C.
    Sanchette, F.
    SURFACE & COATINGS TECHNOLOGY, 2008, 202 (16): : 4047 - 4055
  • [43] DC Magnetron Sputtered IZTO Thin Films for Organic Photovoltaic Application
    Lee, Hye Ji
    Noyiyana, Imas
    Putri, Maryane
    Koo, Chang Young
    Lee, Jung-A
    Kim, Jeong-Joo
    Jeong, Youngjun
    Lee, Youngu
    Lee, Hee Young
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2018, 18 (02) : 1270 - 1273
  • [44] Structural and optical characterization of DC magnetron sputtered molybdenum oxide films
    V. Nirupama
    P. Sreedhara Reddy
    O. M. Hussain
    S. Uthanna
    Ionics, 2007, 13 : 451 - 454
  • [45] Comparison between DC and RF magnetron sputtered aluminum nitride films
    Morosanu, C
    Dumitru, V
    Cimpoiasu, E
    Nenu, C
    DIAMOND BASED COMPOSITES AND RELATED MATERIALS, 1997, 38 : 127 - 132
  • [46] Surface Morphology of Magnetron Sputtered TiO2 Films
    Sicha, Jan
    Herman, David
    Musil, Jindrich
    Stryhal, Zdenek
    Pavlik, Jaroslav
    PLASMA PROCESSES AND POLYMERS, 2007, 4 : S345 - S349
  • [47] Effect of bias voltage on microstructure of DC magnetron sputtered Al coatings on uranium
    Lü, XC
    Wang, XL
    Lang, DM
    Dong, P
    TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA, 2004, 14 : 247 - 250
  • [48] MAGNETIC-PROPERTIES OF DC MAGNETRON SPUTTERED COCR THIN-FILMS
    LI, ZM
    CAROLAN, JF
    THIN SOLID FILMS, 1987, 154 (1-2) : 431 - 438
  • [49] Properties of DC magnetron sputtered Nb and NbN films for different source conditions
    Iosad, NN
    Klapwijk, TM
    Polyakov, SN
    Roddatis, VV
    Kov'ev, EK
    Dmitriev, PN
    IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 1999, 9 (02) : 1720 - 1723
  • [50] Compositional and structural studies of DC magnetron sputtered SiC films on Si(111)
    Lei, YM
    Yu, YH
    Ren, CX
    Zou, SC
    Chen, DH
    Wong, SP
    Wilson, IH
    THIN SOLID FILMS, 2000, 365 (01) : 53 - 57
12345