Ultrathin Flexible Terahertz Metamaterial Absorber With High Sensitivity for Bending Strain Sensing

被引：0
|
作者：
Chen, Youxin [1 ]
Miao, Yan [1 ]
Zhang, Wenqian [1 ]
Wei, Jiang [2 ]
Fan, Ruoxin [1 ]
Sun, Guotao [1 ]
Wang, Qingkang [3 ]
机构：
[1] Shanghai Jiao Tong University, School of Electronic Information and Electrical Engineering, Department of Micro/Nano Electronics, Shanghai,200240, China
[2] Shanghai Institute of Aerospace Control Technology, Shanghai,201109, China
[3] Shanghai Jiao Tong University, National Key Laboratory of Advanced Micro and Nano Fabrication Technology, Shanghai,200240, China
来源：
IEEE Sensors Journal | 2024年 / 24卷 / 23期
关键词：
Flexible terahertz metamaterial absorber (FTMA) has great potential in sensing applications; such as trace biochemical molecules' detection and strain sensing. However; the research about bending strain sensors based on the FTMAs is still very lacking. Here; an ultrathin; dual-band FTMA is proposed with high sensitivity for bending strain sensing; which is easily fabricated by an advanced microfabrication technology. The FTMA shows excellent mechanical flexibility; attributed to its ultrathin thickness of only ∼ 11.2μm. Experimental results demonstrate optical performance stability and outstanding bending strain sensitivity of FTMAs. After 100 times bending cycles; the optical responses of FTMAs could still remain stable. In addition; for bending strain sensing; experimental results show that the FTMA sensor achieves a 9.85% amplitude change and 30.52-GHz frequency shift; when applying only around 4.44% bending strain; corresponding to the frequency sensitivity up to ~6.18 GHz/%. Hence; this strategy shows the sensing potentials of flexible devices and broadens the application of the THz technology. © 2024 IEEE;
D O I：
10.1109/JSEN.2024.3477709
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页码：38794 / 38800
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