The influence of defects and impurities on electrical properties of high high - k diele dielectrics trics

被引：0
|
作者：
Dabrowski, J. [1 ]
Miyazaki, S. [2 ]
Inumiya, S. [3 ]
Kozlowski, G. [1 ]
Lippert, G. [1 ]
Lu-Pina, G. [1 ]
Nara, Y. [2 ]
Müssig, H.-J. [1 ]
Ohta, A. [2 ]
Pei, Y. [3 ]
机构：
[1] IHP, Im Technologiepark 25, 15236 Fr Frankfurt (Oder), Germany
[2] Graduate School of AdSM, Hiroshima University, Kagamiyama 1-3-3, Higashi-Hiroshima 739-8530, Japan
[3] Semiconductor Leading Edge Technologies, Inc., 16-1 Onogawa, Tukuba 305 305-8501, Japan
来源：
Materials Science Forum | 2009年 / 608卷
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摘要：
204
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页码：55 / 109
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