Making waves: Kinetic processes controlling surface evolution during low energy ion sputtering

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作者：
Chan, Wai Lun [1 ,2 ]
Chason, Eric [1 ]
机构：
[1] Division of Engineering, Brown University, Providence, RI 02912, United States
[2] Department of Materials Science and Engineering, University of Illinois, Urbana-Champaign
来源：
Journal of Applied Physics | 2007年 / 101卷 / 12期
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