Control of epitaxial growth plane of Rh thin films on A-plane sapphire by sputter deposition

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Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan [1 ]
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Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap | / 4 A卷 / 2731-2735期
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Control of epitaxial growth plane - Resistivity - Rf sputtering - XRD;
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