The Influence of Doped Ti Element on Structure and Tribological Properties of WS2 Film

被引：0
|
作者：
Zhang Z.-Y. [1 ,2 ]
Duan Z.-W. [2 ]
Jiang H.-X. [2 ]
Zhang B.-B. [2 ]
Zhao X.-Y. [2 ]
Wu Y.-Z. [1 ]
Wang P. [2 ]
机构：
[1] College of Materials Science and Engineering, Lanzhou University of Technology, Lanzhou
[2] State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou
来源：
Surface Technology | 2022年 / 51卷 / 06期
关键词：
mechanical properties; structure; tribological properties; WS[!sub]2[!/sub]-Ti composite film;
D O I：
10.16490/j.cnki.issn.1001-3660.2022.06.021
中图分类号：
学科分类号：
摘要：
The aim of this work was to improve the mechanical and tribological properties of pure WS2 film. The WS2-Ti composite films with different contents of Ti were prepared by the means of multi-target magnetron sputtering. The energy spectrometer (EDS), Raman spectroscopy (Raman), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), scanning electron microscope (SEM) and nano-indentation tester were used to characterize the film composition, chemical state, crystal structure, morphology and mechanical properties. Furthermore, the ball-on-disk was performed to analyze the tribological property of film under humid air and vacuum conditions. The results show that the doping element Ti significantly improves the microstructure, mechanical properties and tribological properties of the WS2 film. With the increase of Ti content, the crystallinity of the WS2 film decreases and the density increases. Its hardness and Young’s modulus increase from 0.25 GPa and 16.60 GPa to 3.52 GPa and 59.00 GPa, respectively. When the Ti contents is 7.17at.%, the wear rate of the composite film is as low as 0.10×10‒15 m3/(N·m) and 2.66×10‒15 m3/(N·m) under vacuum and humid air environment, respectively. In the vacuum friction test, the wear mechanism of the WS2-based film is adhesive wear, and an appropriate amount of Ti can effectively inhibit the adhesive wear of the film, which greatly reduces the wear rate of the film. In the atmospheric friction test, Ti effectively inhibited the hard particles WO3 from piercing the WS2 molecular protective film, so that the wear life of the composite film was prolonged and the wear rate was reduced. © 2022, Chongqing Wujiu Periodicals Press. All rights reserved.
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页码：239 / 247and266
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