Structural and tribological properties of WS2 films deposited by radio frequency unbalanced magnetron sputtering

被引:0
|
作者
Kong, Liang-Gui [1 ,2 ]
Xu, Shu-Sheng [1 ]
Hao, Jun-Ying [1 ]
机构
[1] State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou,730000, China
[2] University of Chinese Academy of Sciences, Beijing,100049, China
来源
Mocaxue Xuebao/Tribology | 2015年 / 35卷 / 04期
关键词
D O I
10.16078/j.tribology.2015.04.005
中图分类号
学科分类号
摘要
引用
收藏
页码:386 / 392
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