SAW phase/frequency modulation device having periodic micro structure on transmission region

被引:0
|
作者
Miyashita M. [1 ]
Onuki T. [1 ]
Nagasawa S. [1 ]
Kuwano H. [1 ]
机构
[1] Department of Nanomechanics, School of Engineering, Tohoku University, Aramaki, Aoba-ku, Sendai-shi, Miyagi, 980-8579
关键词
Band edge; Band gap; Phononic crystal; Surface acoustic wave;
D O I
10.1299/kikaic.76.1942
中图分类号
学科分类号
摘要
In this paper, we studied basic characteristics of the SAW propagation. When periodic micro structures were formed on the SAW transmission region, the propagation characteristics were dynamically changed. The prototype devices based on this analysis were fabricated and demonstrated. Conventional SAW elements were consisted of IDTs on the piezoelectric material and its transmitting frequency was just determined by the pitch of the IDTs. The periodic micro structures formed on the SAW transmission region can modulate the SAW propagation. Since periodic micro structures are controlled dynamically using the MEMS techniques, phase, frequency and transmitting power of the SAW can be modified.
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页码:1942 / 1944
页数:2
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