Microstructural evolution of SiOx films and its effect on the luminescence of Si nanoclusters

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作者：
Franz, G. [1 ]
Miritello, M. [1 ]
Boninelli, S. [1 ]
Lo Savio, R. [1 ]
Grimaldi, M.G. [1 ]
Priolo, F. [1 ]
Iacona, F. [2 ]
Nicotra, G. [2 ]
Spinella, C. [2 ]
Coffa, S. [3 ]
机构：
[1] MATIS CNR-INFM and Dipartimento di Fisica e Astronomia, Universit di Catania, Via S. Sofia 64, 95123 Catania, Italy
[2] CNR-IMM, Stradale Primosole 50, 95121 Catania, Italy
[3] STMicroelectronics, Stradale Primosole 50, 95121 Catania, Italy
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| 1600年 / American Institute of Physics Inc.卷 / 104期
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