Switch-line phase shifter with RF-MEMS switch

Due to the losses of semiconductor switch, traditional electronic phase shifter could hardly perform desirably at higher frequency. RF MEMS technology demonstrates that it could be used in phase shifter design as a substitute for traditional semiconductor switch. Since series resistor RF MEMS switch has excellent RF performance, it is used in the design of switch-line phase shifter. This phase shifter achieves phase shift from 0° to 180° steps 22.5° by using RF MEMS switch to switch between different delay-time lines. The simulation results demonstrate that the insertion loss is from -0.3 dB to -0.7 dB, and the return loss is lower than -20 dB. The function of phase shift is correct.