user

Ultra-precision motion control and synchronization control for stage of lithography

被引：1
|
作者：
Teng, Wei [1 ]
Liu, Yibing [1 ]
Mu, Haihua [2 ]
机构：
[1] Institute of Electromechanical Project, North China Electric Power University, Beijing 102206, China
[2] College of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
来源：
Jixie Gongcheng Xuebao/Journal of Mechanical Engineering | 2011年 / 47卷 / 11期
关键词：
D O I：
10.3901/JME.2011.11.185
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：185 / 190
相关论文
共 50 条
  • [21] Yaw error correction of ultra-precision stage for scanning beam interference lithography systems
    Lu, Sen
    Yang, Kaiming
    Zhu, Yu
    Wang, Leijie
    Zhang, Ming
    Yang, Jin
    [J]. PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART I-JOURNAL OF SYSTEMS AND CONTROL ENGINEERING, 2018, 232 (07) : 869 - 878
  • [22] Control of ultra precision hybrid stage
    Park, Yonmook
    Uh, Jiho
    Yoo, Hosun
    [J]. 2005 IEEE INTERNATIONAL CONFERENCE ON MECHATRONICS AND AUTOMATIONS, VOLS 1-4, CONFERENCE PROCEEDINGS, 2005, : 906 - 910
  • [23] Ultra-precision stage control based on friction model of non-resonant ultrasonic motor
    Hashimoto, S
    Ohishi, K
    Ohishi, T
    Ishikawa, T
    Kosaka, K
    Egashira, Y
    Kubota, H
    Ohmi, T
    [J]. 8TH IEEE INTERNATIONAL WORKSHOP ON ADVANCED MOTION CONTROL, PROCEEDINGS, 2004, : 559 - 564
  • [24] Performance evaluation of five-DOF motion in ultra-precision linear stage
    Kwang-Il Lee
    Jae-Chang Lee
    Seung-Han Yang
    [J]. International Journal of Precision Engineering and Manufacturing, 2014, 15 : 129 - 134
  • [25] Centralized ultra-precision service control system for providing ultra-precision services in large-scale deterministic networks
    Kim, Eungha
    Ryoo, Yeoncheol
    Yoon, Binyeong
    Cheung, Taesik
    [J]. 2022 THIRTEENTH INTERNATIONAL CONFERENCE ON UBIQUITOUS AND FUTURE NETWORKS (ICUFN), 2022, : 122 - 124
  • [26] Performance evaluation of five-DOF motion in ultra-precision linear stage
    Lee, Kwang-Il
    Lee, Jae-Chang
    Yang, Seung-Han
    [J]. INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2014, 15 (01) : 129 - 134
  • [27] Key points of motion control for stage of lithography
    [J]. Teng, W. (tengw@ncepu.edu.cn), 1600, Chinese Mechanical Engineering Society (50):
  • [28] Ultra precision motion control of a multiple degrees of freedom magnetic suspension stage
    Shan, XM
    Kuo, SK
    Zhang, JH
    Menq, CH
    [J]. IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2002, 7 (01) : 67 - 78
  • [29] The centering and leveling adjustment and control technology for the ultra-precision turntable
    Tian, Yanrong
    Wang, Yun
    Wang, Longxiao
    Zhao, Weirui
    [J]. 2015 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: OPTOELECTRONIC MEASUREMENT TECHNOLOGY AND SYSTEMS, 2015, 9618
  • [30] CONTROL AND ELIMINATION OF LEAD SCREW BACKLASH FOR ULTRA-PRECISION POSITIONING
    SATO, K
    MURAYAMA, Y
    IMADA, S
    SHIMOKOHBE, A
    [J]. JSME INTERNATIONAL JOURNAL SERIES C-DYNAMICS CONTROL ROBOTICS DESIGN AND MANUFACTURING, 1995, 38 (01): : 36 - 41
12345