Ultra-precision motion control and synchronization control for stage of lithography

被引：1
|
作者：
Teng, Wei [1 ]
Liu, Yibing [1 ]
Mu, Haihua [2 ]
机构：
[1] Institute of Electromechanical Project, North China Electric Power University, Beijing 102206, China
[2] College of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
来源：
Jixie Gongcheng Xuebao/Journal of Mechanical Engineering | 2011年 / 47卷 / 11期
关键词：
D O I：
10.3901/JME.2011.11.185
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：185 / 190
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