Design and fabrication of high vacuum gauge based on micro hotplate

被引：3
|
作者：
Fengtian, Zhang [1 ]
Yingbin, Zhen [1 ]
Bin, Tang [1 ]
Wei, Su [1 ]
Zhen'An, Tang [2 ]
机构：
[1] Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, Sichuan,621900, China
[2] Institute of Electronic Science and Technology, Dalian University of Technology, Dalian, Liaoning,116024, China
来源：
Key Engineering Materials | 2015年 / 645卷
关键词：
D O I：
10.4028/www.scientific.net/KEM.645-646.698
中图分类号：
学科分类号：
摘要：
10
引用
收藏
页码：698 / 705
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