Mikromechanische Thermische Sensoren

被引：0
|
作者：
Ashauer, Matthias [1 ]
机构：
[1] Hahn-Schickard-Gesellschaft, Institut für Mikro- und Informationstechnik, Villingen-Schwenningen
来源：
VDI Berichte | 2008年 / 2011期
关键词：
MEMS - Temperature measurement;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
With thermal measurement principles it is possible to realize various of sensor effects. These sensors can easily be manufactured with the Micro Electro Mechanical Systems (MEMS) technology. After a short definition of the term thermal sensors some basic technologies of MEMS to produce such sensors are presented. Following article shows actual purchasable sensors and the micro mechanical thermal sensors which are current developed.
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页码：263 / 272
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