Enhanced mass transport in ultrarapidly heated Ni/Si thin-film multilayers

被引：0

作者：

Cook, L.P. ^{[1
,2
]}

Cavicchi, R.E. ^{[1
]}

Bassim, N. ^{[1
,3
]}

Eustis, S. ^{[1
,4
]}

Wong-Ng, W. ^{[1
]}

Levin, I. ^{[1
]}

Kattner, U.R. ^{[1
]}

Campbell, C.E. ^{[1
]}

Montgomery, C.B. ^{[1
]}

Egelhoff, W.F. ^{[1
]}

Vaudin, M.D. ^{[1
]}

机构：

[1] National Institute of Standards and Technology, Gaithersburg, MD 20899, United States

[2] PhazePro Technologies, LLC, Hustontown, PA 17229, United States

[3] Naval Research Laboratory, Washington, DC 20375, United States

[4] Directed Vapor Technologies International, Inc., Charlottesville, VA 22903, United States

来源：

Journal of Applied Physics | 2009年 / 106卷 / 10期

关键词：

We investigated multilayer and bilayer Ni/Si thin films by nanodifferential scanning calorimetry (nano-DSC) at ultrarapid scan rates; in a temperature-time regime not accessible with conventional apparatus. DSC experiments were completed at slower scan rates as well; where it was possible to conduct parallel rapid thermal annealing experiments for comparison. Postexperimental characterization was accomplished by x-ray diffraction; and by transmission electron microscopy (TEM) and energy-filtered TEM of thin cross sections prepared by focused ion beam milling. We found that rate of heating has a profound effect on the resulting microstructure; as well as on the DSC signal. After heating to 560 °C at 120 °C/s; the general microstructure of the multilayer was preserved; in spite of extensive interdiffusion of Ni and Si. By contrast; after heating to 560 °C at 16000 ° C/s; the multilayer films were completely homogeneous with no evidence of the original multilayer microstructure. For the slower scan rates; we interpret the results as indicating a solid state diffusion-nucleation-growth process. At the higher scan rates; we suggest that the temperature increased so rapidly that a metastable liquid was first formed; resulting in complete intermixing of the multilayer; followed by crystallization to form solid phases. The integrated DSC enthalpies for both multilayer and bilayer films are consistent with this interpretation; which is further supported by thermodynamic predictions of metastable Ni/Si melting and solid state Ni/Si interdiffusion. Our results suggest that use of heating rates > 10000 °C/s may open new avenues for intermetallic micro- and nanofabrication; at temperatures well below those prevailing during explosive silicidation. © 2009 American Institute of Physics;

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Bassim, N.
Eustis, S.
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Levin, I.
Kattner, U. R.
Campbell, C. E.
Montgomery, C. B.
Egelhoff, W. F.
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