Effect of nitrogen flow ratio on the microstructure evolution and nanoindented mechanical property of the Ta-Si-N thin films

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Department of Mechanical Engineering, Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 701, Taiwan [1 ]
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J Mater Res | 2008年 / 2卷 / 494-499期
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10.1557/jmr.2008.0065
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