Study on uniform deposition of spherical diamond film on a large area substrate

被引：0
|
作者：
Xiang, Bing-Kun [1 ,2 ]
Zuo, Dun-Wen [2 ]
Li, Duo-Sheng [2 ]
Lu, Hai-Quan [2 ]
Chen, Rong-Fa [2 ]
机构：
[1] Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
[2] College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
来源：
Rengong Jingti Xuebao/Journal of Synthetic Crystals | 2009年 / 38卷 / 01期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：33 / 38
相关论文
共 50 条
  • [1] Synthesis of uniform and large area nano-diamond film
    Gong, Hui
    Fan, Zhengxiu
    Jiang, Xin
    Klages, C.P.
    Guangxue Xuebao/Acta Optica Sinica, 2002, 22 (06): : 718 - 722
  • [2] Deposition of large area uniform diamond films by microwave plasma CVD
    Weng, J.
    Liu, F.
    Xiong, L. W.
    Wang, J. H.
    Sun, Q.
    VACUUM, 2018, 147 : 134 - 142
  • [3] Diamond deposition on large-area substrate by hot-filament CVD
    Tsutsumoto, T
    NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY, 2000, 10 (01): : 34 - 34
  • [4] UNIFORM AND LARGE-AREA DEPOSITION OF DIAMOND BY CYCLIC THERMAL PLASMA CHEMICAL-VAPOR-DEPOSITION
    EGUCHI, K
    YATA, S
    YOSHIDA, T
    APPLIED PHYSICS LETTERS, 1994, 64 (01) : 58 - 60
  • [5] Influence of the substrate position on the quality of large area CVD diamond thin film
    Wang, Li-Jun
    Wang, Xiao-Ping
    Zhang, Lei
    Wang, Long-Yang
    Weixi Jiagong Jishu/Microfabrication Technology, 2008, (04): : 39 - 42
  • [6] Large area deposition of thick diamond film by direct-current PACVD
    Baik, YJ
    Lee, JK
    Lee, WS
    Eun, KY
    THIN SOLID FILMS, 1999, 341 (1-2) : 202 - 206
  • [7] Multimode cavity type MPACVD reactor for large area diamond film deposition
    Vikharev, A. L.
    Gorbachev, A. M.
    Lobaev, M. A.
    Radishev, D. B.
    DIAMOND AND RELATED MATERIALS, 2018, 83 : 8 - 14
  • [8] DEPOSITION OF DIAMOND FILM ON SI SUBSTRATE WITH BUCKYTUBE COATING
    WANG, KZ
    LI, YB
    CHEN, ZQ
    ZHU, YQ
    GAO, ZD
    LIANG, J
    WEI, BQ
    WU, DH
    HUI, MJ
    CHINESE SCIENCE BULLETIN, 1995, 40 (15): : 1245 - 1248
  • [9] Deposition of diamond film on Si substrate with buckytube coating
    王克忠
    李玉宝
    陈志清
    朱艳秋
    高志栋
    梁吉
    魏秉庆
    吴德海
    惠梦君
    ChineseScienceBulletin, 1995, (15) : 1245 - 1248
  • [10] SYNTHESIS OF THICK, LARGE AREA DIAMOND FILM
    WOODIN, RL
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1991, 202 : 93 - PHYS
12345